Rapid thermal processing :  proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 / 
edited by A. Slaoui ... [et al.]. 
 - Amsterdam ;  Oxford :  Elsevier,  1999. 
 - 170-350 p. :  ill. ;  29 cm. 
 - European Materials Research Society symposia proceedings ;  v. 84 .
<br/><br/> "Reprinted from Materials science in semiconductor processing, vol. 1/2-4"--T.p. verso. 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>0080436129 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Rapid thermal processing--Congresses<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Semiconductor doping--Congresses
<br/><br/><label>LC Class. No.: </label>TK7871.85 
<br/><br/><label>Dewey Class. No.: </label>621.3815/2