TY  - BOOK
AU  - Slaoui A
ED  - Symposium I on Rapid Thermal Processing
ED  - European Materials Research Society
TI  - Rapid thermal processing: proceedings of Symposium I on Rapid Thermal Processing of the E-MRS 1998 Spring Conference, Strasbourg, France, 16-19 June 1998 
SN  - 0080436129
AV  - TK7871.85 
U1  - 621.3815/2 
PY  - 1999///
CY  - Amsterdam, Oxford
PB  - Elsevier
KW  - Rapid thermal processing
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Design and construction
KW  - Semiconductor doping
N1  - "Reprinted from Materials science in semiconductor processing, vol. 1/2-4"--T.p. verso; Includes bibliographical references
ER  -