TY  - GEN
AU  - Capezzuto, Pio.
AU  - Madan,Arun
AU  - Bruno, Giovanni.
TI  - Plasma deposition of amorphous silicon-based materials
SN  - 012137940X (alk. paper)
AV  - TK7871.99.A45 
U1  - 621.3815/2 20
PY  - 1995///
CY  - Boston
PB  - Academic Press
KW  - Silicon alloys
KW  - Amorphous semiconductors
KW  - Plasmaenhanced chemical vapor deposition
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -