Plummer James D

Silicon VLSI technology : fundamentals, practice, and modeling / James D. Plummer, Michael Deal, Peter B. Griffin. - Upper Saddle River, NJ : Prentice Hall, 2000. - xiv, 817 p. : ill. ; 25 cm. - Prentice Hall electronics and VLSI series .

Includes bibliographical references and index.

0130850373


Integrated circuits--Very large scale integration--Design and construction
Silicon
Silicon oxide films
Metal oxide semiconductors
Silicononinsulator technology

TK7874.75

621.39/5