TY  - GEN
AU  - Plummer James D
AU  - Deal Michael D
AU  - Griffin Peter B
TI  - Silicon VLSI technology: fundamentals, practice, and modeling 
SN  - 0130850373
AV  - TK7874.75 
U1  - 621.39/5 
PY  - 2000///
CY  - Upper Saddle River, NJ
PB  - Prentice Hall
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Silicon
KW  - Silicon oxide films
KW  - Metal oxide semiconductors
KW  - Silicononinsulator technology
N1  - Includes bibliographical references and index
ER  -